Read e-book online Advanced Metallization and Interconnect Systems for Ulsi PDF

By R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi

ISBN-10: 1558994122

ISBN-13: 9781558994126

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2013 pp. 27–41. R. J. E. Anderson, Improved fine powder production of titanium alloys using close-coupled gas atomization, Proceedings of MS&T 2013, Montreal, QC, Oct 27–31, 2013. [4] P. Lowenstien, Specialty metal powders by the rotating electrode process, Prog. Powder. Metall. 37 (1982). T. R. A. Newborn, Powder metallurgy of advanced titanium alloys, Key Eng. Mater. 77–78 (1993) 115–140. 32 Titanium Powder Metallurgy [6] S. Pleir, W. Goy, B. Schaub, M. Hohmann, M. Mede, R. Schumann, EIGA-innovative production method for metal powder from reactive and refractory alloys, PM2TEC, MPIF, Princeton, NJ, 2004.

Miner. Process. 81 (2006) 133–140. J. S. Williams, Carbothermic reduction of ilmenite (FeTiO3) and rutile (TiO2), Metall. Mater. Trans. B 30B (1999) 1075–1081. [97] G. Zhang, O. Ostrovski, Reduction of titanium by methane-hydrogen-argon gas mixture, Metall. Mater. Trans. B 31B (2000) 129–139. [98] G. Zhang, O. Ostrovski, Reduction of ilmenite concentrates by methane-containing gas: part I. Effects of ilmenite composition, temperature and gas composition, Can. Metall. Quarter. 40 (3) (2001) 317–326.

P. H. Baker, Development of a 10,000-ampere cell for electrorefining titanium, Bureau of Mines, 1960. [11] A. Boozenny, Na0-TiCl2-TiCl3 Equilibrium in NaCl melts, TMCA, 1961. [12] A. P. F. J. Henderson, The effects of alternating current density and atmospheric contamination on titanium electrorefining cell operation, TMCA, 1961. R. P. J. Henderson, Electrodeposition of titanium at low temperatures, TMCA, 1962. R. P. J. Henderson, Electrodeposition of titanium in NaCl-KCl electrolyte at 700°C, TMCA, 1962.

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Advanced Metallization and Interconnect Systems for Ulsi Applications in 1997 by R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi


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