By R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi
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Extra info for Advanced Metallization and Interconnect Systems for Ulsi Applications in 1997
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Advanced Metallization and Interconnect Systems for Ulsi Applications in 1997 by R. Cheung, J. Klein, K. Tsubouchi, M. Murakami, N. Kobayashi